diff --git a/arch/arm/boot/dts/sama5d31.dtsi b/arch/arm/boot/dts/sama5d31.dtsi
index 7997dc9863ed2cb7dd1cfc49c6f5bfcc70304d45..883878b32971a915d6d841ecc404cba1d9dd6056 100644
--- a/arch/arm/boot/dts/sama5d31.dtsi
+++ b/arch/arm/boot/dts/sama5d31.dtsi
@@ -12,5 +12,5 @@
 #include "sama5d3_uart.dtsi"
 
 / {
-	compatible = "atmel,samad31", "atmel,sama5d3", "atmel,sama5";
+	compatible = "atmel,sama5d31", "atmel,sama5d3", "atmel,sama5";
 };
diff --git a/arch/arm/boot/dts/sama5d33.dtsi b/arch/arm/boot/dts/sama5d33.dtsi
index 39f832253cafb7613ed46bed3d2cb3d19f0a1b1f..4b4434aca351208553a857d0b9a662c4a977b2e3 100644
--- a/arch/arm/boot/dts/sama5d33.dtsi
+++ b/arch/arm/boot/dts/sama5d33.dtsi
@@ -10,5 +10,5 @@
 #include "sama5d3_gmac.dtsi"
 
 / {
-	compatible = "atmel,samad33", "atmel,sama5d3", "atmel,sama5";
+	compatible = "atmel,sama5d33", "atmel,sama5d3", "atmel,sama5";
 };
diff --git a/arch/arm/boot/dts/sama5d34.dtsi b/arch/arm/boot/dts/sama5d34.dtsi
index 89cda2c0da39268f548533538fb76a9d08652a6e..aa01573fdee9366dbb23086092e8dde3d7970d45 100644
--- a/arch/arm/boot/dts/sama5d34.dtsi
+++ b/arch/arm/boot/dts/sama5d34.dtsi
@@ -12,5 +12,5 @@
 #include "sama5d3_mci2.dtsi"
 
 / {
-	compatible = "atmel,samad34", "atmel,sama5d3", "atmel,sama5";
+	compatible = "atmel,sama5d34", "atmel,sama5d3", "atmel,sama5";
 };
diff --git a/arch/arm/boot/dts/sama5d35.dtsi b/arch/arm/boot/dts/sama5d35.dtsi
index d20cd71b5f0e7f142c9b83ce81b5f9d5a7e73e6a..16c39f4c96a40841d07bac8ffce1d768d1c69cc4 100644
--- a/arch/arm/boot/dts/sama5d35.dtsi
+++ b/arch/arm/boot/dts/sama5d35.dtsi
@@ -14,5 +14,5 @@
 #include "sama5d3_tcb1.dtsi"
 
 / {
-	compatible = "atmel,samad35", "atmel,sama5d3", "atmel,sama5";
+	compatible = "atmel,sama5d35", "atmel,sama5d3", "atmel,sama5";
 };
diff --git a/arch/arm/boot/dts/sama5d36.dtsi b/arch/arm/boot/dts/sama5d36.dtsi
index db58cad6acd32633b88bf88a0589885bfa58ed9b..e85139ef40aff61a1da90f76d963ed015e9d3fc9 100644
--- a/arch/arm/boot/dts/sama5d36.dtsi
+++ b/arch/arm/boot/dts/sama5d36.dtsi
@@ -16,5 +16,5 @@
 #include "sama5d3_uart.dtsi"
 
 / {
-	compatible = "atmel,samad36", "atmel,sama5d3", "atmel,sama5";
+	compatible = "atmel,sama5d36", "atmel,sama5d3", "atmel,sama5";
 };
diff --git a/arch/arm/boot/dts/sama5d3xcm.dtsi b/arch/arm/boot/dts/sama5d3xcm.dtsi
index 962dc28dc37b9bbc4a3427c4e127d26fc689bf63..cfcd200b0c177967f91d9c26e4372d4f1f514b27 100644
--- a/arch/arm/boot/dts/sama5d3xcm.dtsi
+++ b/arch/arm/boot/dts/sama5d3xcm.dtsi
@@ -8,7 +8,7 @@
  */
 
 / {
-	compatible = "atmel,samad3xcm", "atmel,sama5d3", "atmel,sama5";
+	compatible = "atmel,sama5d3xcm", "atmel,sama5d3", "atmel,sama5";
 
 	chosen {
 		bootargs = "console=ttyS0,115200 rootfstype=ubifs ubi.mtd=5 root=ubi0:rootfs";